专利名称：SILICON POLYMERS, METHODS OF
POLYMERIZING SILICON COMPOUNDS,AND METHODS OF FORMING THIN FILMSFROM SUCH SILICON POLYMERS
发明人：Dmitry KARSHTEDT,Joerg
ROCKENBERGER,Fabio ZURCHER,BrentRIDLEY,Erik SCHER
申请号：US13897296申请日：20130517
公开号：US20130252407A1公开日：20130926
专利附图：
摘要：Compositions and methods for controlled polymerization and/or
oligomerization of hydrosilanes compounds including those of the general formulaeSiHand SiHas well as alkyl- and arylsilanes, to produce soluble silicon polymers as aprecursor to silicon films having low carbon content.
申请人：Dmitry KARSHTEDT,Joerg ROCKENBERGER,Fabio ZURCHER,Brent RIDLEY,ErikSCHER
地址：San Francisco CA US,San Jose CA US,Brisbane CA US,San Carlos CA US,SanFrancisco CA US
国籍：US,US,US,US,US
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