DEVICE FOR THE VAPORISATION OF CONDENSED MATERIALS

专利名称：DEVICE FOR THE VAPORISATION OF

CONDENSED MATERIALS

发明人：REINHOLD, MARKUS,STRAUCH, GERHARD

KARL,GERSDORFF, MARKUS,MEYER,NICO,KITTEL, FLORENZ

申请号：EP2005056841申请日：20051216

公开号：WO2006069921A3公开日：20070419

摘要：The invention relates to a device for the vaporisation of condensed (solid orliquid) materials, in particular, of starting materials for OLED production, comprising acontainer (1), for housing the material with a gas supply line (11) and a gas exhaust line(12). A number of inserts (4) for housing the material are arranged in the container (1)which have an individual flow thereover, whereby the inserts (4) are arranged one overthe other in the vertical direction and comprise recesses (5) for housing the material inthe horizontal direction over which a flow is possible. Several gas flows may flow inparallel over several inserts.

申请人：AIXTRON AG,REINHOLD, MARKUS,STRAUCH, GERHARD KARL,GERSDORFF,MARKUS,MEYER, NICO,KITTEL, FLORENZ

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