ARRANGEMENT FOR THE PRODUCTION OF STRUCTURED SUBST

专利名称：ARRANGEMENT FOR THE PRODUCTION OF

STRUCTURED SUBSTRATES

发明人：THIEL, Klaus-Peter,BOHNET, Hans申请号：EP118140.6申请日：20111107公开号：EP2635936B1公开日：20180221

摘要：An arrangement for producing structured substrates is provided, which includesa device for applying layer systems including a device for applying liquid materials torotating substrates, a housing, a rotating holder for the substrate to be coated, a feederfor liquid materials to be applied, and a collection device having multiple removalcontraptions for liquid materials that do not remain on the substrate. The housing of thedevice is filled with an inert gas, in particular dried, molecular nitrogen, noble gas, or amixture thereof. The additional receptacles and conduits of the arrangement forproducing structured substrates are gas-tight and are designed such that an inertmolecular nitrogen or noble gas atmosphere is created above the liquid contentsthereof. The collection device has various collection zones in which different liquidmaterials can be selectively collected and selectively removed via the associated removalcontraption.

申请人：Bohnet, Hans,BOHNET HANS,BOHNET, HANS

地址：DE

国籍：DE

代理机构：Straub, Bernd

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