专利名称：MEASUREMENT AND ENDPOINTING OF
SAMPLE THICKNESS
发明人：YOUNG, Richard J.,PETERSON,
Brennan,MORIARTY, Michael,SCHAMPERS,Rudolf Johannes Peter Gerardus
申请号：EP09824231.6申请日：20091102公开号：EP2351062A2公开日：20110803
摘要：An improved method for TEM sample creation. The use of a SEM-STEM
detector in the dual-beam FIB/SEM allows a sample to be thinned using the FIB, while theSTEM signal is used to monitor sample thickness. A preferred embodiment of thepresent invention can measure the thickness of or create S/TEM samples by using aprecise endpoint detection method that is reproducible and suitable for automation.Preferred embodiments also enable automatic endpointing during TEM lamella creationand provide users with direct feedback on sample thickness during manual thinning.Preferred embodiments of the present invention thus provide improved methods forendpointing sample thinning and methods to partially or fully automate endpointing toincrease throughput and reproducibility of TEM sample creation.
申请人：FEI Company
地址：5350 NE Dawson Creek Drive Hillsboro, OR 97124 US
国籍：US
代理机构：Bakker, Hendrik
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